Exnodes accelerates onboard inspection for real-time tool & process monitoring
Sub-10 nm sensitivity breakthrough
Three 15 nm SiO2 nanoparticles on a Silicon wafer
Computational Parallel Inspection®
- Parallel Illumination
- visible wavelength for adaptive & wide-field coverage
- Computational Imaging
- wide-field & high-resolution matched detection
- Yield Learning
- artificial intelligence for defect classification
- Learn more from 10 issued patents
Compact footprint enables onboard unpatterned inspection modules
Onboard inspection enables real-time feedback & feedforward loops
Real-time feedback & feedforward loops maximize yield in high volume manufacturing
High sensitivity & throughput inspection
120 wafers/hour at 20 nm SiO2 sensitivity
Simultaneous detection of 8.9 nm to 100 nm defects
Validated by industry leaders over a wide range of defect sizes
