Exnodes licenses onboard inspection for real-time tool & process monitoring

Stand-alone inspection creates slow feedback & feedforward loops

Onboard inspection enables real-time feedback & feedforward loops

Real-time feedback & feedforward loops maximize yield in high volume manufacturing

Computational Parallel Inspection® (CPI)

• Parallel Illumination
  • visible wavelength for adaptive & wide-field coverage
• Computational Imaging
  • wide-field & high-resolution matched detection
• Yield Learning
  • artificial intelligence for defect classification
• Learn more from 10 issued patents on CPI

• compact footprint enables onboard unpatterned inspection modules
• applications include continuous tool/process monitoring, qualification & review

Sub-10 nm sensitivity breakthrough

CPI video of three 15 nm SiO₂ nanoparticles on a Silicon wafer

High sensitivity & throughput inspection

CPI enables 120 wafers/hour at 20 nm SiO₂ sensitivity

Validated by chipmakers over a wide range of defect sizes

Simultaneous detection of 8.9 nm to 100 nm defects