Exnodes licenses onboard inspection for real-time tool & process monitoring
Stand-alone inspection creates slow feedback & feedforward loops

Onboard inspection enables real-time feedback & feedforward loops
Real-time feedback & feedforward loops maximize yield in high volume manufacturing

Computational Parallel Inspection® (CPI)
- Parallel Illumination
- visible wavelength for adaptive & wide-field coverage
- Computational Imaging
- wide-field & high-resolution matched detection
- Yield Learning
- artificial intelligence for defect classification
- Learn more from 10 issued patents on CPI

- compact footprint enables onboard unpatterned inspection modules
- applications include continuous tool/process monitoring, qualification & review
Sub-10 nm sensitivity breakthrough
CPI video of three 15 nm SiO2 nanoparticles on a Silicon wafer
High sensitivity & throughput inspection

CPI enables 120 wafers/hour at 20 nm SiO2 sensitivity
Validated by chipmakers over a wide range of defect sizes

Simultaneous detection of 8.9 nm to 100 nm defects
